Ilim ha’m ja’miyet Issue 1-1 (2023) · pp. 16-18
РЕЛАКСАЦИОННЫЕ ЯВЛЕНИЯ В СТРУКТУРАХ КОНТАКТНОЙ МЕТАЛЛИЗАЦИИ, СТИМУЛИРОВАННЫЕ ТЕРМИЧЕСКОЙ ОБРАБОТКОЙ
Исмайлов, К.А., Атаубаева, А.Б., Насырова, Г.М.
Abstract
The effect of heat treatment on the magnitude of internal mechanical stresses in ohmic contacts to Si has been studied. Heat treatment of the Au-Ti-n+-Si contact structure led to sample straightening and in the Au-Ti-Pd2Si-p+-Si contact structure to an increase in the radius of curvature.
omik kontaktkremniyissiqlik bilan ishlov berishichki mexanik kuchlanishlaregrilik radiusiомический контакткремнийтермическая обработкавнутренние механические напряжениярадиус кривизны
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