Ilim ha’m ja’miyet 1-1-son (2023) · 4-6-betlar
PULSE PHOTON PROCESSING OF A THIN-FILM Si/Mg/Si/Sitall System
Asanov, D.J.
Annotatsiya
This is not a sufficient condition for creating silicide-silicon heterojunctions and building new semiconductor devices. Therefore, it is of undoubted interest to develop new methods for the formation of Mg2Si films on silicon, in which higher temperatures can be used to improve the crystalline quality of the films. In this work, the rapid heat treatment (RHT) method was used to form magnesium silicide. on the basis of which the optimal temperatures and pulse durations for the synthesis of magnesium silicide are determined
tez issiqlik bilan ishlov berish (TIB)magniy silicidiimpulsli fotonik ishlov berishgeterostrukturaSi/Mg/Si/sitall tizimiбыстрая термическая обработка (БТО)силицид магнияимпульсная фотонная обработкагетероструктурасистема Si/Mg/Si/ситалл
Metadata manbasi: jurnal OAI-PMH arxivi · Sindex toʻliq matnni saqlamaydi, manbaga havola beradi.